The AC-63 is a reliable Force Balance Accelerometer based on the latest MEMS (Micro Electro-Mechanical Systems) technology.
The sensor package is designed for applications regarding earthquake and structural monitoring and measuring. All these applications require a high dynamic, rugged sensor with minimum maintenance.
The MEMS accelerometer has a variable capacitor design that is operated in a closed-loop configuration with a custom mixed-signal application-specific integrated circuit (ASIC).
The MEMS accelerometer is a wafer stack composed of four individual wafers bonded together. Within the inner two wafers of the stack, and suspended by silicon springs, is a moving structure called the proof-mass. This forms a differential variable capacitance between the surfaces of the moving proof-mass
|